薄膜铌酸锂微环高精度微波光子温度传感器

王慧婕; 常祺伟; 游亚军; 杨绪磊; 贺文君; 何剑; 刘毅; 丑修建

doi:10.37188/CO.2025-0121

薄膜铌酸锂微环高精度微波光子温度传感器

doi: 10.37188/CO.2025-0121

cstr: 32171.14.CO.2025-0121

王慧婕^{1, 3},
常祺伟^{2, 4},
游亚军^{2, 4, ,},
杨绪磊^{2, 4},
贺文君^{2, 3},
何剑^{1, 3},
刘毅^{1, 3,},
丑修建^{1, 2, 3}

1.
极限环境光电动态测试技术与仪器全国重点实验室, 山西太原 030051
2.
铁电物理微纳器件与系统山西省重点实验室, 山西太原 030051
3.
中北大学仪器与电子学院, 山西太原 030051
4.
中北大学航空宇航学院, 山西太原 030051

基金项目: 国家自然科学基金（No. U23A20639, No. U2341210, No. 62401524, No. 62371426）；广东省基础与应用基础研究基金委员会（No. 2023A1515110148）

详细信息

作者简介:
游亚军（1990—），男，山西晋中人，博士，副教授，2019年于西北工业大学获得博士学位，主要从事智能材料多场耦合响应机理、智能微纳结构与传感器件、铁电材料与光电子器件、微纳制造技术等方面研究。E-mail：yajunyou@nuc.edu.cn

刘　毅（1984—），男，山西长治人，博士，教授，2014年于天津大学获得博士学位，主要从事铁电声光器件与系统、太赫兹信号产生/光谱测试、光纤金宝搏188软件怎么用器/传感器方面的研究。E-mail：liuyi_bs@nuc.edu.cn

中图分类号: TN252;
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- 文章访问数: 31
- HTML全文浏览量: 14
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- 被引次数: 0
出版历程
- 收稿日期: 2025-09-18
- 录用日期: 2025-11-26
- 网络出版日期: 2025-12-30

High-precision microwave photonic temperature sensor using thin-film lithium niobate micro-ring

WANG Hui-jie^{1, 3},
CHANG Qi-wei^{2, 4},
YOU Ya-jun^{2, 4
, ,},
YANG Xu-lei^{2, 4},
HE Wen-jun^{2, 3},
HE Jian^{1, 3},
LIU Yi^{1, 3
,},
CHOU Xiu-jian^{1, 2, 3}

1.
State key Laboratory of Extreme Environment Optoelectronic Dynamic Measurement Technology and Instrument, North University of China, Taiyuan 030051, China
2.
Shanxi Key Laboratory of Ferroelectric Physical Micro-nano Devices and Systems, Taiyuan 030051, China
3.
School of Instrument and Electronics, North University of China, Taiyuan 030051, China
4.
School of Aerospace Engineering, North University of China, Taiyuan 030051, China

Funds: Supported by National Natural Science Foundation of China (No. U23A20639, No. U2341210, No. 62401524, No. 62371426); Basic and Applied Basic Research Foundation of Guangdong Province (No. 2023A1515110148)

More Information

Corresponding author: yajunyou@nuc.edu.cn

摘要

摘要:
为实现高精度温度传感，本文提出了一种基于高品质因子薄膜铌酸锂微环谐振器与微波光子读取技术的温度传感器。该系统中，薄膜铌酸锂微环谐振器（线宽为2.87 pm，Q值高达10⁵）同时作为温度感知单元和微波光子滤波器的核心处理部件，利用热光效应将温度变化转换为光学谐振波长偏移，并创新性地借助微波光子技术将其线性映射为微波通带频率变化，采用矢量网络分析仪对微波频率响应进行精确探测，通过高精度频率响应变化实现温度测量，最终建立了温度与频率偏移量之间的定量关系模型。与传统直接检测光学波长变化的方法相比，微波光子学读取技术通过将微小的光学谐振波长偏移量线性地转换为微波通带中心频率的变化，突破了光谱仪固有的波长检测分辨率限制。实验结果表明，传感器灵敏度达27 MHz/°C，分辨率可达0.002 °C，在0.01 °C实验温度变化条件下，保持良好的线性响应。本研究有效解决了传统光学测温中灵敏度与分辨率之间的权衡问题，为片上集成高精度温度传感提供了新方案。
- 微环谐振器 /
- 温度传感 /
- 薄膜铌酸锂 /
- 微波光子
Abstract:
This paper presents a high-precision temperature sensor based on a high-quality factor thin-film lithium niobate microring resonator integrated with a microwave photonic readout system. The microring resonator, with a narrow linewidth of 2.87 pm and a high Q-factor of 10⁵, functions simultaneously as the temperature-sensing element and the core signal processing component of a microwave photonic filter. Through the thermo-optic effect, temperature variations are converted into shifts in the optical resonance wavelength, which are innovatively mapped to linear changes in the passband center frequency of the microwave photonic filter. A vector network analyzer is employed to accurately detect the microwave frequency response, enabling temperature measurement via high-resolution frequency variations and establishing a quantitative model between temperature and frequency shift. In contrast to conventional methods that directly track optical wavelength shifts, the proposed microwave photonic readout technique linearly converts minute resonance wavelength shifts into changes in the microwave center frequency, thereby overcoming the resolution limitations inherent in conventional optical spectrum analyzers. Experimental results demonstrate a sensitivity of 27 MHz/°C and a resolution of 0.002 °C, with excellent linearity maintained under temperature variations as small as 0.01 °C. This work effectively resolves the trade-off between sensitivity and resolution in traditional optical temperature sensing, offering a novel solution for on-chip integrated high-precision temperature monitoring.
- micro-ring resonator /
- temperature sensor /
- thin film lithium niobate /
- microwave photons

HTML全文

图 1 结构示意图。(a) 微环谐振器的三维示意图；(b) 耦合区域的扫描电子显微镜显微图像；(c) 显示硅/二氧化硅/铌酸锂（Si/SiO₂/LN）异质界面的横截面透射电子显微镜图像

Figure 1. Schematic diagram of the structure. (a) 3D schematic of the micro-ring resonator; (b) SEM micrograph of the coupling region; (c) Cross-sectional SEM image revealing Si/SiO₂/LN heterointerfaces

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图 2 加工流程示意图

Figure 2. Processing flowchart

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图 3 温度传感系统示意图及工作原理。（ASE：放大自发辐射；OI：光隔离器；PC：偏振控制器；IM：强度调制器；VS：电压源；EDFA：掺铒光纤放大器；Opt. Switch：光开关；PD：光电探测器；VNA：矢量网络分析仪；OSA：光谱分析仪）

Figure 3. Schematic of the temperature sensing system and operational principle. (ASE: amplified spontaneous emission; OI: optical isolator; PC: polarization controller; IM: intensity modulator; VS: Voltage source; EDFA: Erbium-doped Optical Fiber Amplifier; Opt. Switch: optical switch; PD: photodetector; VNA: vector net analyzer; OSA: optical spectrum analyzer)

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图 4 波长检测法。（a）微环谐振器透射光谱；（b）25 °C至31 °C温度调制下的谐振波长漂移；（c）微环谐振器线宽表征；（d）温度-波长的线性相关性及拟合函数

Figure 4. Wavelength detection method. (a) Transmission spectrum of a micro-ring resonator; (b) Resonant wavelength drift under thermal modulation from 25 °C to 31 °C; (c) Full width at half maximum of the micro-ring resonator; (d) Linear temperature-wavelength correlation with fitting function

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图 5 频移检测法。（a）0-20 GHz范围内的谐振谱；（b）18 °C至34 °C温度调制下的谐振频率偏移；（c）变化1 °C温度-频率的线性相关性及拟合函数；（d）变化0.01 °C温度-频率的线性相关性及拟合函数

Figure 5. Frequency shift detection method. (a) Resonant response over the 0-20 GHz range; (b) Resonant frequency drift under thermal modulation from 18 °C to 34 °C; (c) Linear temperature-frequency relationship (per 1 °C) and fitting function; (d) Linear temperature-frequency relationship (per 0.01 °C) and fitting function

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图 6 稳定性测试

Figure 6. Stability testing

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图 7 光-微波域转换示意图

Figure 7. Optical-to-Microwave domain conversion diagram

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表 1 各类温度传感器的性能对比

Table 1. Performance comparison of various temperature sensors

温度传感器	灵敏度	分辨率
本文 ★	27 MHz/°C	0.002 °C
超细纤维结谐振器 [19]	22.81 pm/°C	0.877 °C
级联微环谐振器 [20]	293.9 pm/°C	0.18 °C
封装铌酸锂谐振器 [23]	34.38 pm/°C	5.6×10^-⁴ °C
基于光电振荡器的应变不敏感温度传感器 [32]	1 MHz/°C	0.5 °C
多波长布里渊铒光纤金宝搏188软件怎么用器温度传感器 [33]	13.08 MHz/°C	0.765 °C
基于光电振荡器的片上传感 [34]	7.7 GHz/°C	0.02 °C

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