SERS characteristics analysis of composite Ag/SiO2 sinusoidal grating
doi: 10.3788/CO.20191201.0059
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摘要: 当前微流控表面增强拉曼散射(SERS)检测领域常用的贵金属纳米颗粒溶胶单位体积内热点区域数量有限且热点区域范围较小，而贵金属纳米三维阵列结构加工时间长，成本高昂并存在"记忆效应"。本文提出了集成到微流道的复合Ag/SiO2正弦光栅SERS基底结构，可以利用金宝搏188软件怎么用 干涉光刻技术进行制备，无需预制掩膜版，可实现大面积、低成本SERS基底简易快速制备。利用严格耦合波分析方法(RCWA)建立了复合正弦光栅表面电场增强数学评估模型，推导了表面等离子体共振(SPP)耦合吸收率数学模型，分析了入射光、复合正弦光栅结构与外界环境介电常数的优化匹配关系，得到了入射光785 nm条件下的最佳复合正弦光栅结构。通过制备加工并实验验证了复合正弦光栅的SERS性能，SERS增强因子(EF)能够达到104。Abstract: In current microfluidic-SERS(surface-enhanced Raman scattering) detection fields, noble metal nanoparticle sols are commonly used but a limited number of hot spots exist per unit of its volume and the areas of these hot spots are very small. Another common SERS substrate, the noble metal nano-three-dimensional array, has a time-consuming fabrication process and is costly to manufacture, while also succumbing to the memory effect. In this paper, a composite Ag/SiO2 sinusoidal grating SERS substrate structure integrated into a microchannel is proposed, which can be fabricated by laser interference photolithography and has no need for prefabricated photomasks. Large area and low-cost SERS substrates can be created simply and rapidly by using this method. The mathematical evaluation model of electric field enhancement near the composite sinusoidal grating surface is established with rigorous coupled wave analysis(RCWA). The mathematical model of the surface plasmon polaritons(SPP) coupling absorption is derived. The optimization matching relation of incident light, the composite sinusoidal grating structure and the dielectric constant of the external environment are analyzed. The optimal composite sinusoidal grating structure was obtained when the wavelength of incident light was 785 nm. The composite sinusoidal grating was prepared and its SERS performance was verified experimentally, proving that the SERS enhancement factor(EF) can reach 104.
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Key words:
- RCWA /
- composite sinusoidal grating /
- SERS /
- microfluidics
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图 1 (a)金宝搏188软件怎么用 干涉图样光强度分布；(b)复合正弦光栅截面示意图
Figure 1. (a) Light intensity distribution of laser interference; (b)Section diagram of the composite sinusoidal grating
图 2 (a)吸收率随衍射级次变化曲线；(b)吸收率随入射光波长变化曲线；(c)吸收率随入射角变化曲线
Figure 2. (a) Absorbance as a function of diffraction grades; (b)Absorbance as a function of incident light wavelength; (c)Absorbance as a function of incident angle
图 3 (a)吸收率随光栅周期变化曲线；(b)吸收率随光栅振幅变化曲线；(c)吸收率随光栅银层厚度变化曲线
Figure 3. (a) Absorbance as a function of the grating period; (b)Absorbance as a function of grating amplitude; (c)Absorbance as a function of grating silver layer thickness
图 4 吸收率随光栅表面环境介电常数变化曲线
Figure 4. Absorbance as a function of the dielectric constant above the grating surface
图 5 (a)复合正弦银光栅表面增强电场分布；(b)复合正弦金光栅表面增强电场分布；(c)复合矩形银光栅表面增强电场分布
Figure 5. (a) Electric field distribution of composite sinusoidal silver grating; (b)Electric field distribution of composite sinusoidal gold grating; (c)Electric field distribution of composite rectangular silver grating
图 6 (a)复合正弦光栅结构示意图；(b)干涉光刻系统
Figure 6. (a) Structural diagram of the composite sinusoidal grating; (b)Interference photolithography system
图 7 (a)复合正弦光栅SEM表征图；(b)R6G溶液的SERS光谱图；(c)R6G拉曼特征峰处信号强度的均值误差棒
Figure 7. (a) SEM image of the composite sinusoidal grating; (b)SERS spectrum of R6G solutions; (c)Error bars of the mean intensity of R6G Raman peaks from five average spectra
表 1 Theoretical EF values of the three gratings
Table 1. Theoretical EF values of the three gratings
Grating category EF Sine Water/Ag/SiO2 grating 7.4×104 Sine Water/Au/SiO2 grating 2.0×104 Rectangular Water/Ag/SiO2 grating 4.4×104 
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