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摘要: 为了实现傅立叶变换光谱仪的微型化与轻量化，设计了轻型栅条分束器结构，代替传统的平行平板分束器，分析了轻型栅条分束器的栅棱对光谱复原的影响，提出了制作误差容限。对微型傅立叶变换光谱仪进行了建模仿真，得到了轻型栅条分束器的最佳结构。通过系统仿真进行光谱反演，得到了复原光谱，并计算了轻型栅条分束器引入的光谱误差。完成了原理样机的搭建与调试，得到了实际系统的复原光谱，证明了微型化系统的可行性。该微型化系统相对于传统傅立叶变换光谱仪，具有体积小，稳定性好的优点，可用于在线监测。
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关键词:
- 微型傅立叶变换红外光谱仪 /
- 轻型栅条分束器 /
- 光谱复原
Abstract: In order to achieve the goal of miniaturization and light weight of Fourier transform spectrometer, a light-weight grid beam splitter structure was designed instead of the traditional parallel plate beam splitter. The influence of the grid edge of the grid beam splitter on spectrum reconstruction was analyzed, and the tolerance of production error was proposed. The micro-Fourier transform spectrometer was modeled and simulated, and the optimal structure of the grid beam splitter was obtained. The spectral inversion was performed by system simulation, and the restored spectrum was obtained. The spectral error introduced by the grid beam splitter was calculated. The construction and debugging of the prototype was completed, and the recovered spectrum of the actual system was obtained, which proved the feasibility of the miniaturized system. Compared with the traditional Fourier transform spectrometer, the miniaturization system has the advantages of small volume and good stability, and can be used for online monitoring. -
图 2 (a) 10周期轻型栅条分束器及其(b)局部放大图
Figure 2. (a) 10-period grid beam splitter and (b) its partial enlargement.
图 4 分束窗厚度误差与SCE的关系曲线图
Figure 4. Relational graph between the thickness error of splitter window and the SCE
图 6 (a) 采用理想分束器和(b)采用轻型栅条分束器得到的FTIRS光线追迹图
Figure 6. FTIRS ray tracing with (a) ideal beam splitter and with (b) light-weight grid beam splitter
图 7 探测器光通量与多级微反射镜位置关系图
Figure 7. Relationship between the detector flux and the position of multistage micro-mirror
图 8 系统仿真结果。(a)理想干涉图像；(b)带有栅条分束器的干涉图像；(c)理想干涉图采样序列；(d)带有栅条分束器的干涉采样序列；(e)理想复原光谱；(f)带有栅条分束器的复原光谱
Figure 8. System simulation results. (a) Ideal interferogram image; (b) interferogram image with beam splitter; (c)ideal interferogram sampling sequence; (d)interferogram sampling sequence with beam splitter; (e)ideal recovered spectrum; (f) recovered spectrum with beam splitter
图 9 硅基腐蚀轻型栅条分束器的制作流程
Figure 9. Fabrication process of silicon-based etched grid beam splitter
图 10 栅条分束器实物图。(a)10周期栅条分束器；(b)20周期栅条分束器；(c)显微镜图
Figure 10. Prototype of grid beam splitter; (a)10-period grid beam splitter; (b) 20-period grid beam splitter; (c) microscopic topography
图 11 10周期轻型栅条分束器腐蚀深度测试结果
Figure 11. Etching depth test result of 10-period grid beam splitter
图 12 20周期轻型栅条分束器腐蚀深度测试结果
Figure 12. Etching depth test result of 20-period grid beam splitter
图 14 (a) 10周期栅条分束器干涉条纹图；(b)20周期栅条分束器干涉条纹图；(c)10周期栅条分束器干涉采样图；(d)20周期栅条分束器干涉采样图；(e)校正后10周期栅条分束器干涉采样图；(f)校正后20周期栅条分束器干涉采样图
Figure 14. (a) Interference fringe pattern of 10-period grid beam splitter; (b) interference fringe pattern of 20-period grid beam splitter; (c) interference sampling diagram of 10-period grid beam splitter; (d) interference sampling diagram of 20-period grid beam splitter; (e) interference sampling diagram of 10-period grid beam splitter after correction; (f) interference sampling diagram of 20-period grid beam splitter after correction
图 15 理想光谱与2种栅条分束器的复原光谱图
Figure 15. Ideal spectrum and restored spectra of lo-period and 20-period grid beam splitters
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