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摘要:
面向极紫外光刻光源对高功率、高光束质量CO2种子金宝搏188软件怎么用 的应用需求，本文开展了基于射频波导体制的CO2金宝搏188软件怎么用 放大技术研究。一方面，分析了射频波导放大器的静态插入损耗与输出光束质量随入射光参数的变化关系，确定了最佳模式匹配参数。另一方面，建立了多级射频波导放大仿真模型，理论计算了工作气压与放电泵浦功率等参数对放大倍率的影响规律。在实验中，引入增益介质调控技术，实现了金宝搏188软件怎么用 系统放大性能的优化。实验结果表明：在2.5 m的波导长度下，传输效率达到了91.4%，输出光束在水平方向与竖直方向上的光束质量因子分别为1.03与1.05；二级射频波导放大系统的总放大倍率达68倍，最终获得了重复频率为50 kHz、脉冲宽度为20 ns、平均功率为17.1 W的高光束质量的CO2金宝搏188软件怎么用 输出。
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关键词:
- CO2金宝搏188软件怎么用 /
- 主振荡功率放大 /
- 模式匹配 /
- 增益介质调控
Abstract:Toward the application demand for high-power, high-beam-quality CO2 seed lasers in extreme ultraviolet lithography light sources, the CO2 laser amplification technology were investigated based on a radio-frequency (RF) waveguide architecture. On one hand, The static insertion loss and output beam quality of the RF waveguide amplifier were measured as a function of incident beam parameters and the optimal mode-matching parameters were determined. On the other hand, a numerical model of the multi-stage RF waveguide amplification was developed to evaluate the effects of the gas pressure and the discharge pumping power on the amplification factor. The technology of regulating with gain medium was implemented to optimize the amplification performance in the experiment. The experimental results indicate that the optimal mode-matching conditions were identified with a waveguide length of 2.5 m, yielding a transmission efficiency of 91.4%. The beam quality factors of the output beam in the horizontal and vertical directions were 1.03 and 1.05, respectively. An overall amplification factor of 68× was achieved in a dual-stage RF waveguide amplifier. The system delivered CO2 laser emission with a repetition rate of 50 kHz, a pulse duration of 20 ns, and an average output power of 17.1 W, satisfying the design criteria and demonstrating its suitability for high-power, high-beam-quality seed laser applications.
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Key words:
- CO2 laser /
- master oscillator power amplifier /
- mode-matching /
- gain medium regulation
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图 3 传输效率随入射光束直径的变化情况(插图为输出光束强度分布图)
Figure 3. Transmission efficiency varying with the diameter of the incident light beam. (The inset illustrates the distribution of the output light beam intensity)
图 4 光束质量因子测量结果。（a）光束质量因子随入射光束直径的变化关系；（b）入射直径为2 mm时测量结果，插图为光束强度分布图
Figure 4. Measurement results of the beam quality factor. (a) Relationship between the beam quality factor and the diameter of the incident beam; (b) measurement results when the incident diameter is 2 mm, with the inset showing the beam intensity distribution
图 5 不同腔压下放大系统输出功率随泵浦放电功率的变化情况
Figure 5. Output power of the amplification system varying with the discharge pumping power at different cavity pressures
图 6 不同腔压下输出功率随放电泵浦功率的变化情况。（a）第一级放大器；（b）第二级放大器
Figure 6. Variation of output power with discharge pumping power at different cavity pressures. (a) First-stage amplifier; (b) second-stage amplifier
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